Research

The Takahata Lab strives to develop micro/nano-engineered devices and their manufacturing methods towards realizing innovative products and technologies to shape a better world. The following lists the themes of our current research focus and selected research topics in each.

Micro/Nanofabrication Processes
3D Micromachining using Miniaturized Electrical Discharge
Microplasma-Based Patterning of Conducting Polymers

Direct Writing of Thin Film by Scanning-Mode Micro Glow Plasma

Capacitive Sensor Formation via Integrated Micro Tesla Valves
Surface Micromachining with Liquid Sacrificial Layers
MEMS-Based Micro-Electro-Discharge Machining (M3EDM)

Micromachined Actuators
Precessing-Coin-Like Rotary Actuators/Optical Scanners
Micro Actuators Enabled by Ferrofluid Levitated Rotors/Sliders
Shape-Memory Alloy Actuation via Direct RF Power Transfer

RF Actuation of Hydrogel Valves for Controlled Drug Delivery
Synchronous Wireless Control of Micro Actuator Array
Diamagnetic MEMS: Micro Graphite Rotors

Micromachined Sensors
Switch-Mode Capacitive Pressure Sensors
Micromachined Inductive Force Sensors
Implantable Pressure Sensors Based on Stainless Steel
Wireless Resonant Temperature Sensors
Biocompatible MEMS Circuit Breaker Chips

Flex-Circuit Wireless Sensors Based on Responsive Hydrogels

Medical MEMS

Distal Scanner Integrated Endoscopes for Multimodal 360° Imaging


Smart Stents for Advanced Remote Diagnosis and Therapy

Implantable Wireless Drug Delivery Chips

Tissue Stiffness Sensors
Smart Steerable Catheters
Aneurysm Coil Embolization Sensors


Vertically Aligned Carbon Nanotubes (CNT Forest): Process and Application
(collaboration with Nojeh Lab, UBC)

3D Micro/Nanopatterning and Batch-Mode Processing using Microplasma
Post-Growth Planarization of CNT Forests

Transforming Darkest Material on Earth to Reflective Mirrors
High-Power MEMS Contact Switches
Cone-Shaped Scanning Probes for Atomic Force Microscopy
Piezoresistive Pressure and Strain Sensors


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