Table 50 Main Model Parameters
|
|
|
|
|
Process related Parameters
|
|
|
EPSROX
|
relative gate dielectric constant
|
3.9 (SiO2)
|
-
|
TOXE
|
Electrical gate equivalent oxide thickness
|
3E-9
|
m
|
TOXP
|
Physical gate equivalent oxide thickness
|
TOXE
|
-
|
TOXM
|
Gate oxide thickness at which parameters are extracted
|
TOXE
|
-
|
DTOX
|
defined as TOXE-TOXP
|
0.0
|
m
|
XJ
|
Source / Drain junction depth
|
150E-9
|
m
|
GAMMA1
|
Body-effect coefficient near the surface
|
|
V1/2
|
GAMMA2
|
Body-effect coefficient in the substrate
|
|
V1/2
|
NGATE
|
Poly Si-gate doping concentration
|
0.0
|
cm-3
|
NDEP
|
Channel doping concentration at depletion edge for zero body bias
|
If NDEP is not given but GAMMA1 is given:
If both are not given: NDEP=1E17
|
cm-3
|
NSUB
|
Substrate doping concentration
|
6E16
|
cm-3
|
NSD
|
Source / Drain doping concentration
|
1e20
|
cm-3
|
XT
|
Doping depth
|
1.55E-7
|
V
|
VBX
|
Vbs at which depletion region equals XT
|
|
V
|
RSH
|
Sheet resistance
|
0.0
|
|
RSHG
|
Gate electrode sheet resistance
|
0.1
|
|
|
|
|
|
|
Threshold Voltage
|
|
|
VFB
|
Flatband voltage
|
-1.0
|
V
|
VTH0
|
Long channel threshold voltage at Vbs = 0
|
NMOS: 0.7 PMOS: -0.7
|
V
|
DELVTO
|
Zero bias threshold voltage variation
|
0
|
V
|
PHIN
|
Non-uniform vertical doping effect on surface potential
|
0.0
|
V
|
K1
|
First-order body effect coefficient
|
0.5
|
V0.5
|
K2
|
Second-order body effect coefficient
|
0.0
|
-
|
K3
|
Narrow width coefficient
|
80.0
|
-
|
K3B
|
Body effect coefficient of K3
|
0.0
|
1/V
|
W0
|
Narrow width parameter
|
2.5E-6
|
m
|
LPE0
|
Lateral non-uniform doping parameter at Vbs = 0
|
1.74e-7
|
m
|
LPEB
|
Lateral non-uniform doping effect on K1
|
0.0
|
m
|
VBM
|
Maximum applied body bias in VTH0 calculation.
|
-3.0
|
V
|
DVT0
|
First coefficient of short-channel effect on VTH
|
2.2
|
-
|
DVT1
|
Second coefficient of short-channel effect on VTH
|
0.53
|
-
|
DVT2
|
Body-bias coefficient of short-channel effect on VTH
|
-0.032
|
1/V
|
DVTP0
|
First coefficient of drain-induced Vth shift for long-channel pocket devices
|
0.0
|
m
|
DVTP1
|
Second coefficient of drain-induced Vth shift for long-channel pocket devices
|
0.0
|
V
|
DVT0W
|
First coefficient of narrow-width effect on VTH for small channel length
|
0.0
|
-
|
DVT1W
|
Second coefficient of narrow-width effect on VTH for small channel length
|
5.3E6
|
1/m
|
DVT2W
|
Body-bias coefficient of narrow-width effect on VTH for small channel length
|
-0.032
|
1/V
|
ETA0
|
DIBL coefficient in the subthreshold region
|
0.08
|
-
|
ETAB
|
Body-bias for the subthreshold DIBL effect
|
-0.07
|
1/V
|
DSUB
|
DIBL coefficient exponent in subthreshold region
|
DROUT
|
-
|
|
|
|
|
|
Mobility
|
|
|
U0
|
Low-field mobility
|
NMOS: 670 PMOS: 250
|
cm2/(Vs)
|
UA
|
First-order mobility degradation coefficient due to vertical field
|
MOBMOD=0 and 1: 1E-9 MOBMOD=2: 1E-15
|
m/V
|
UB
|
Second-order mobility degradation coefficient
|
1E-19
|
(m/V)2
|
UC
|
Coefficient of the body-bias effect of mobility degradation
|
MOBMOD=1: -0.0465
MOBMOD=0 and 2: 0.0465E-9
|
1/V
m/V2
|
UD
|
Mobility coulomb scattering coefficient
|
1E14
|
1/m2
|
UP
|
Mobility channel length coefficient
|
0
|
1/m2
|
LP
|
Mobility channel length exponential coefficient
|
1E-8
|
m
|
EU
|
Exponent for mobility degradation of MOBMOD = 2
|
NMOS: 1.67 PMOS: 1.0
|
-
|
|
|
|
|
|
Drain current
|
|
|
VSAT
|
Saturation velocity
|
8.0E4
|
m/s
|
A0
|
Bulk charge effect coefficient
|
1.0
|
-
|
A1
|
First non-saturation effect factor
|
0.0
|
1/V
|
A2
|
Second non-saturation effect factor
|
1.0
|
-
|
AGS
|
Coefficient of Vgs dependence of bulk charge effect
|
0.0
|
1/V
|
B0
|
Bulk charge effect coeff. for channel width
|
0.0
|
m
|
B1
|
Bulk charge effect width offset
|
0.0
|
m
|
KETA
|
Body-bias coefficient of the bulk charge effect
|
-0.047
|
1/V
|
|
|
|
|
|
Subthreshold region
|
|
|
VOFF
|
Offset voltage in subthreshold region for large W and L
|
-0.08
|
V
|
VOFFL
|
Channel length dependence of VOFF
|
0.0
|
mV
|
MINV
|
Vgsteff fitting parameter for moderate inversion condition
|
0.0
|
-
|
NFACTOR
|
Subthreshold swing factor
|
1.0
|
-
|
CIT
|
Interface trap capacitance
|
0.0
|
F/m2
|
CDSC
|
Drain-Source to channel coupling capacitance
|
2.4E-4
|
F/m2
|
CDSCB
|
Body-bias coefficient of CDSC
|
0.0
|
F/Vm2
|
CDSCD
|
Drain-bias coefficient of CDSC
|
0.0
|
F/Vm2
|
|
|
|
|
|
Drain-Source resistance
|
|
|
RDSW
|
Zero bias LDD resistance per unit width for RDSMOD = 0
|
200
|
(µm)WR
|
RDSWMIN
|
LDD resistance per unit width at high Vgs and zero Vbs for RDSMOD = 0
|
0.0
|
(µm)WR
|
RDW
|
Zero bias LDD drain resistance per unit width for RDSMOD = 1
|
100
|
(µm)WR
|
RDWMIN
|
Zero bias LDD drain resistance per unit width at high Vgs and zero Vbs for RDSMOD = 1
|
0.0
|
(µm)WR
|
RSW
|
Zero bias LDD source resistance per unit width for RDSMOD = 1
|
100
|
(µm)WR
|
RSWMIN
|
Zero bias LDD resistance per unit width at high Vgs and zero Vbs for RDSMOD = 1
|
0.0
|
(µm)WR
|
WR
|
Channel width dependence parameter of LDD resistance
|
1.0
|
-
|
PRWB
|
Body bias coefficient of LDD resistance
|
0.0
|
V-0.5
|
PRWG
|
Gate bias dependence of LDD resistance
|
1.0
|
1/V
|
NRS
|
Number of source diffusion squares
|
1.0
|
-
|
NRD
|
Number of drain diffusion squares
|
1.0
|
-
|
|
|
|
|
|
Channel geometry
|
|
|
WINT
|
Channel width offset parameter
|
0.0
|
m
|
WL
|
Coeff. of length dependence for width offset
|
0.0
|
mWLN
|
WLN
|
Power of length dependence for width offset
|
1.0
|
-
|
WW
|
Coeff. of width dependence for width offset
|
0.0
|
mWWN
|
WWN
|
Power of width dependence for width offset
|
1.0
|
-
|
WWL
|
Coeff. of length and width cross term for width offset
|
0.0
|
mWLN+WWN
|
LINT
|
Channel length offset parameter
|
0.0
|
m
|
LL
|
Coeff. of length dependence for length offset
|
0.0
|
mLLN
|
LLN
|
Power of length dependence for length offset
|
1.0
|
-
|
LW
|
Coeff. of width dependence for length offset
|
0.0
|
mLWN
|
LWN
|
Power of width dependence for length offset
|
1.0
|
-
|
LWL
|
Coeff. of length and width cross term for length offset
|
0.0
|
mLWN+LLN
|
LLC
|
Coefficient of length dependence for CV channel length offset
|
LL
|
-
|
LWC
|
Coefficient of width dependence for CV channel length offset
|
LW
|
-
|
LWLC
|
Coefficient of length and width cross term dependence for CV channel length offset
|
LWL
|
-
|
WLC
|
Coefficient of length dependence for CV channel width offset
|
WL
|
-
|
WWC
|
Coefficient of width dependence for CV channel width offset
|
WW
|
-
|
WWLC
|
Coefficient of length and width cross term dependence for CV channel width offset
|
WWL
|
-
|
LMIN
|
Minimum channel length
|
0.0
|
m
|
LMAX
|
Maximum channel length
|
1.0
|
m
|
WMIN
|
Minimum channel width
|
0.0
|
m
|
WMAX
|
Maximum channel width
|
1.0
|
m
|
DWG
|
Coefficient of gate bias dependence of Weff
|
0.0
|
m/V
|
DWB
|
Coefficient of substrate bias dependence of Weff
|
0.0
|
m/V0.5
|
|
|
|
|
|
Output resistance
|
|
|
PCLM
|
Channel length modulation parameter
|
1.3
|
-
|
PDIBL1
|
First output resistance DIBL effect parameter
|
0.39
|
-
|
PDIBL2
|
Second output resistance DIBL effect parameter
|
8.6m
|
-
|
PDIBLB
|
Body bias coefficient of output resistance DIBL effect
|
0.0
|
1/V
|
DROUT
|
Channel-length dependence coefficient of the DIBL effect on output resistance
|
0.56
|
-
|
PSCBE1
|
First substrate current induced body-effect parameter
|
4.24E8
|
V/m
|
PSCBE2
|
Second substrate current induced body-effect coefficient
|
1.0E-5
|
m/V
|
PVAG
|
Gate-bias dependence of Early voltage
|
0.0
|
-
|
FPROUT
|
Effect of pocket implant on Rout degradation
|
0.0
|
V/m0.5
|
PDITS
|
Impact of drain-induced Vth shift on Rout
|
0.0
|
V-1
|
PDITSL
|
Channel-length dependence of drain-induced Vth shift on Rout
|
0.0
|
m-1
|
PDITSD
|
Vds dependence of drain-induced Vth shift on Rout
|
0.0
|
V-1
|
ALPHA0
|
First impact ionization parameter
|
0.0
|
Am/V
|
ALPHA1
|
Length dependent substrate current parameter
|
0.0
|
A/V
|
BETA0
|
First VDS dependent parameter of impact ionization current
|
0
|
1/V
|
BETA1
|
Second VDS dependent parameter of impact ionization current
|
0
|
|
BETA2
|
Third VDS dependent parameter of impact ionization current
|
0.1
|
V
|
VDSATII0
|
Nominal drain saturation voltage at threshold for impact ionization current
|
0.9
|
V
|
TII
|
Temperature dependent parameter for impact ionization current
|
0
|
|
LII
|
Channel length dependent parameter at threshold for impact ionization current
|
0
|
|
ESATII
|
Saturation channel electric field for impact ionization current
|
1E7
|
1/m
|
SII0
|
First VGS dependent parameter for impact ionization current
|
0.5
|
1/V
|
SII1
|
Second VGS dependent parameter for impact ionization current
|
0.1
|
1/V
|
SII2
|
Third VGS dependent parameter for impact ionization current
|
0
|
|
SIID
|
VDS dependent parameter of drain saturation voltage for impact ionization current
|
0
|
1/V
|
|
Unified Current Saturation
|
|
|
LAMBDA
|
Velocity overshoot coefficient If not given or
, velocity overshoot will be turned off!
|
2.0E-5
|
m/s
|
VTL
|
Thermal velocity If not given or
, source end thermal velocity limit will be turned off!
|
2.0E-5
|
m/s
|
LC
|
Velocity back scattering coefficient (~5E-9m at room temperature)
|
0.0
|
m
|
XN
|
Second velocity back scattering coefficient
|
3.0
|
|
|
|
|
|
|
Gate-Induced Drain Leakage model
|
|
|
AGIDL
|
Pre-exponential coefficient for GIDL
|
0.0
|
mho (1/Ohm)
|
BGIDL
|
Exponential coefficient for GIDL
|
2.3e9
|
V/m
|
CGIDL
|
Parameter for body-bias effect on GIDL
|
0.5
|
V³
|
EGIDL
|
Fitting parameter for band bending for GIDL
|
0.8
|
V
|
|
Gate Dielectric Tunneling Current
|
|
|
AIGBACC
|
Parameter for Igb in accumulation
|
0.43
|
|
BIGBACC
|
Parameter for Igb in accumulation
|
0.054
|
|
CIGBACC
|
Parameter for Igb in accumulation
|
0.075
|
1/V
|
NIGBACC
|
Parameter for Igb in accumulation
|
1.0
|
-
|
AIGBINV
|
Parameter for Igb in inversion
|
0.35
|
|
BIGBINV
|
Parameter for Igb in inversion
|
0.03
|
|
CIGBINV
|
Parameter for Igb in inversion
|
0.006
|
1/V
|
EIGBINV
|
Parameter for Igb in inversion
|
1.1
|
V
|
NIGBINV
|
Parameter for Igb in inversion
|
3.0
|
-
|
AIGC
|
Parameter for Igcs and Igcd
|
NMOS: 0.054 PMOS: 0.31
|
|
BIGC
|
Parameter for Igcs and Igcd
|
NMOS: 0.054 PMOS: 0.024
|
|
CIGC
|
Parameter for Igcs and Igcd
|
NMOS: 0.075 PMOS: 0.03
|
V
|
AIGSD
|
Parameter for Igs and Igd
|
NMOS: 0.43 PMOS: 0.31
|
|
BIGSD
|
Parameter for Igs and Igd
|
NMOS: 0.054 PMOS: 0.024
|
|
CIGSD
|
Parameter for Igs and Igd
|
NMOS: 0.075 PMOS: 0.03
|
V
|
DLCIG
|
Source/Drain overlap length for Igs and Igd
|
LINT
|
-
|
NIGC
|
Parameter for Igcs, Igcd, Igs and Igd
|
1.0
|
-
|
POXEDGE
|
Factor for gate oxide thickness in source/drain overlap regions
|
1.0
|
-
|
PIGCD
|
Vgs dependence of Igcs and Igcd
|
1.0
|
-
|
NTOX
|
Exponent for the gate oxide ratio
|
1.0
|
-
|
TOXREF
|
Nominal gate oxide thickness for gate direct tunneling model
|
3E-9
|
m
|
VFBSDOFF
|
Flatband Voltage Offset Parameter
|
0
|
V
|
|
|
|
|
|
Diode Characteristics
|
|
|
IJTHSREV
IJTHDREV
|
(Source) Limiting current in reverse bias region (Drain)
|
IJTHSREV =0.1
IJTHDREV =IJTHSREV
|
A
|
IJTHSFWD
IJTHDFWD
|
(Source) Limiting current in forward bias region (Drain)
|
IJTHSFWD =0.1
IJTHDFWD =IJTHSFWD
|
A
|
XJBVS
XJBVD
|
(Source) Fitting parameter for diode breakdown (Drain)
|
XJBVS=1.0
XJBVD =XJBVS
|
-
|
BVS
BVD
|
(Source) Breakdown voltage (Drain)
|
BVS=10.0
BVD=BVS
|
V
|
JSS
JSD
|
(Source) Bottom junction reverse saturation current density (Drain)
|
JSS=1.0e-4
JSD=JSS
|
A/m²
|
JSWS JSWD
|
Isolation-edge sidewall reverse saturation current density
|
JSWS =0.0 JSWD =JSWS
|
A/m
|
JSWGS JSWGD
|
Gate-edge sidewall reverse saturation current density
|
JSWGS=0.0 JSWGD=JSWGS
|
A/m
|
CJS CJD
|
Bottom junction capacitance per unit area at zero bias
|
CJS=5.0e-4 CJD=CJS
|
F/m²
|
MJS MJD
|
Bottom junction capacitance grating coefficient
|
MJS=0.5 MJD=MJS
|
-
|
MJSWS MJSWD
|
Isolation-edge sidewall junction capacitance grading coefficient
|
MJSWS =0.33 MJSWD =MJSWS
|
-
|
CJSWS CJSWD
|
Isolation-edge sidewall junction capacitance per unit area
|
CJSWS= 5.0e-10 CJSWD=CJSWS
|
F/m
|
CJSWGS CJSWGD
|
Gate-edge sidewall junction capacitance per unit length
|
CJSWGS =CJSWS CJSWGD =CJSWS
|
-
|
MJSWGS MJSWGD
|
Gate-edge sidewall junction capacitance grading coefficient
|
MJSWGS=MJSWS MJSWGD=MJSWS
|
-
|
PBS
|
Source bottom junction built-in potential
|
PBS=1.0
|
V
|
PBD
|
Drain bottom junction built-in potential
|
PBD=PBS
|
V
|
PBSWS
|
Isolation-edge sidewall junction built-in potential of source junction
|
PBSWS =1.0
|
V
|
PBSWD
|
Isolation-edge sidewall junction built-in potential of drain junction
|
PBSWD=PBSWS
|
V
|
PBSWGS
|
Gate-edge sidewall junction built-in potential of source junction
|
PBSWGS =PBSWS
|
V
|
PBSWGD
|
Gate-edge sidewall junction built-in potential of drain junction
|
PBSWGD=PBSWS
|
V
|
|
|
|
|
|
Asymmetric Source/Drain Junction Diode Model
|
|
|
JTSS JTSD
|
Bottom trap-assisted saturation current density (Source side / Drain side)
|
0.0 =JTSS
|
A/m
|
JTSSWS JTSSWD
|
STI sidewall trap-assisted saturation current density (Source side / Drain side)
|
0.0 JTSSWS
|
A/m
|
JTSSWGS JTSSWGD
|
Gate sidewall trap-assisted saturation current density (Source side / Drain side)
|
0.0 JTSSWGS
|
A/m
|
NJTS
|
Non-ideality factor for JTSS, JTSD
|
20
|
|
NJTSSW
|
Non-ideality factor for JTSSWS, JTSSWD
|
20
|
|
NJTSSWG
|
Non-ideality factor for JTSSWGS, JTSSWGD
|
20
|
|
XTSS XTSD
|
Power dependence of JTSS, JTSD on temperature (Source side / Drain side)
|
0.02
|
|
XTSSWS XTSSWD
|
Power dependence of JTSSWS, JTSSWD on temperature (Source side / Drain side)
|
0.02
|
|
XTSSWGS XTSSWGD
|
Power dependence of JTSSWGS, JTSSWGD on temperature (Source side / Drain side)
|
0.02
|
|
VTSS VTSD
|
Bottom trap-assisted voltage dependent parameter (Source side / Drain side)
|
10 =VTSS
|
V
|
VTSSWS VTSSWD
|
STI sidewall trap-assisted voltage dependent parameter (Source side / Drain side)
|
10 VTSSWS
|
V
|
VTSSWGS VTSSWGD
|
STI sidewall trap-assisted voltage dependent parameter (Source side / Drain side)
|
10 VTSSWGS
|
V
|
TNJTS
|
Temperature coefficient for NJTS
|
0
|
|
TNJTSSW
|
Temperature coefficient for NJTSSW
|
0
|
|
TNJTSSWG
|
Temperature coefficient for NJTSSWG
|
0
|
|
|
|
|
|
|
Capacitance
|
|
|
XPART
|
Charge partitioning parameter
|
0.0
|
-
|
CGSO
|
Non LDD region gate-source overlap capacitance per unit W
|
calculated, see Overlap Capacitance Model
|
F/m
|
CGDO
|
Non LDD region gate-drain overlap capacitance per unit W
|
calculated, see Overlap Capacitance Model
|
F/m
|
CGBO
|
Gate-bulk overlap capacitance per unit L
|
0.0
|
F/m
|
CGSL
|
Light doped gate-source region overlap capacitance
|
0.0
|
F/m
|
CGDL
|
Light doped gate-drain region overlap capacitance
|
0.0
|
F/m
|
CKAPPAS
|
Coefficient of bias-dependent overlap capacitance on source side
|
0.6
|
V
|
CKAPPAD
|
Coefficient of bias-dependent overlap capacitance on drain side
|
CKAPPAS
|
V
|
CF
|
Fringing field capacitance
|
|
F/m
|
CLC
|
Constant term for the short channel model
|
0.1E-7
|
m
|
CLE
|
Exponential term for the short channel model
|
0.6
|
-
|
DLC
|
Length offset fitting parameter for CV model
|
LINT
|
m
|
DWC
|
Width offset fitting parameter for CV model
|
WINT
|
m
|
VFBCV
|
Flatband voltage parameter for CAPMOD = 0
|
-1.0
|
V
|
NOFF
|
CV parameter in Vgsteff,CV for weak to strong inversion
|
1.0
|
-
|
VOFFCV
|
CV parameter in Vgsteff,CV for weak to strong inversion
|
0.0
|
V
|
ACDE
|
Exponential coefficient for charge thickness in accumulation and depletion regions in CAPMOD=2
|
1.0
|
m/V
|
MOIN
|
Coefficient for the gate-bias dependent surface potential
|
15.0
|
-
|