This lab is for electives: VNA and On wafer probing The time was just right. Next time: with EM scan, prepare a lab for PC design elective ------------------------------------- 2023 *** VNA: Bench 3, M1022 with ENA Equipment: - ENA + e-cal - N6705C as power supply - Mini-circuits 16" semi rigid cables - Diagram of 2-Port network - Mini circuits 1GHz BPF - Mini circuits ZFL-500-BNC amplifier (goal was to use a 6GHz amp but it was damaged) Props: - 2.4mm mechanical cal kit from SoC, ecal from 1022, Anritusu SOLT kit from SoC - MegiQ sandbox - printouts from sandbox manual I explained: - what the VNA does and basic settings - what other VNAs look like - what cal kits look like - demo measurement of BPF, explained plots in d vs f and Smith chart - demo measurement of amplifier (optional) Bench 2, M1022 with P5024B Equipment: - P5024B (with 3.5mm connector savers) + ecal - HMP4040 Power supply - Mini circuits ZFL-500-BNC amplifier - Mini circuits ZX10-2-12-S+ Splitter/ Combiner 2-1200MHz - Various SMA cables + SMA to BNC adapters - DSA815 SA - 10dB SMA ATTEN I explained: - full two port measurements of Amplifier with 10dB pad at the output to protect the VNA - How to measure 1dB compression VNA Help > Tutorials > Measurements > Gain Compression Help file recommends setting an S21 measurement in swept frequency, freeze the trace and slowly increase Pin to detect the first frequency (?) at which 1dB compression happens. Best way to find compression point is set marker, right click on marker and serach : Compression. For this ampl: Gain @1dB = 22.3 Pin = ~ -15dBm @ f = 128MHz (approx) Set Sweep setup: Start power -25dBm Start power -14dBm CW 128MHz ... 400MHz you need to repeat the measurement for different frequencies Points 801 IF BW 10KHz 128MHz @ Pin = -16.1dBm - How to measure IP3 You need to use IMD personality and combine P1 and P3 with a splitter/combiner to feed P1 of DUT. P2 of DUT connects directly to P2 of VNA. VNA Help > Applications > Swept IMD and IM spectrum > Swept IMD and IM Spectrum > Swept IMD IMD setup *** Frequency Sweep fc start=10M stop=600M FixedDeltaF=5M # Points = 801 IFBW = 1KHz *** Power Power ON Coupled Tone Powers Set input power ---> -24dBm *** Configure External Combiner Using One Ref Receiver f1 = Port1 f2 = Port3 Then right click on trace to choose desired measurement variable set to OIP3 First I connected output of splitter/combiner to SA to show the 2 tones sweeping in frequency. Then I connected to DUT to measure IP3 *** Probe station I could not get a fully functional probe station. Instead this part of the lab was a show and tell. Equipment: - Suss probe station - Nikon camera and old light ring from RF-1 station - Cascade Micropositioners (Suss micropositioners were missing and for this reason we could not practice landing the probes) - TV from my home for Nikon camera Props: - Suss old probes - ISS map - My old NT25 ICs I explained: - Parts of probe station - Movement of chuck, micoscope, micropositioners - how to do ISS cal -------------------------------------- 2022 *** VNA: One bench with ENA connected to LCD projector (used ECESS screen) Equipment: - ENA - 1-2GHz tunnable BPF from SOC - N to SMA adapters - Mini-circuits semirig cables - MegiQ sandbox - printouts from sandbox manual Props: - 2.4mm mechanical cal kit from SoC, ecal from 1022, Anritusu SOLT kit from SoC - Thurnderbolt VNA (no PC yet, just for show and tell) I could not get the new Ecal to work with the ENA, instead I entered a generic cal kit for the Anritsu SOLT cal kit. It worked well. The same kits also worked with the SandBox from MegiQ I explained: - what the VNA doesand basic settings - what other VNAs look like - what cal kits look like - demo measurement of BPF, explained plots in d vs f and Smith chart At the end of the lab: (but there was not enough time) a chance to play with Sandbox *** On wafer probing One bench with a probe station + probes Equipment - RF1 Cascade Probe station (SoC) - Motic microscope camera (SoC) - LED light ring (SoC) - DMI LCD monitor (engs serv) - West micropositioner (SoC) - Zuss demo broken |Z| probes (RR) - Old NT25 ICs (RR) - hex wrench Props: - 2 boxes of broken 65G ACP probes (SoC) - Fiber optic light ring (SoC) - Manuals for ISSs Problems: Had to put together the probe station. Chuck was rusted. Cleanned with baking soda and tooth brush. Holes are now plugged. Had to adapt Motic microscope to this probe station by raising the position of the microscope mount. I explained: - what is a probe station - degrees of freedom - light rings - why people break probes - demo how to land probe (broken Suss) on an IC inside the gel packbox, no need to old IC. - let students land the probes - explainned calibratio with a printout of the ISS map